Name:
6-inch Vertical Furnace Quartz Boat Base
Function & Application:
Designed to support a quartz boat on top, this base is used in high-temperature semiconductor wafer processing steps such as diffusion, oxidation, CVD deposition, and annealing. It helps distribute gas flow evenly to ensure stable exposure of wafers in the top-mounted quartz boat.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The vertical furnace quartz boat base is a high-purity quartz component designed to support top-mounted quartz boats during high-temperature semiconductor processes such as diffusion, oxidation, CVD, and annealing. Its structure enables even gas flow distribution to ensure stable and uniform wafer exposure. Manufactured with excellent thermal stability, corrosion resistance, and low impurity levels, the base features a sandblasted surface to minimize particle generation. Built for precision and durability, it is essential for cleanroom wafer processing in vertical furnace systems.