Quartz bases
Name:
12-inch Quartz Boat Base
Function & Application:
Baffles are placed in the central groove of the base to disperse gas flow and ensure stable gas exposure to the silicon wafers inside the quartz boat positioned on top. It is applied in wafer manufacturing processes such as diffusion, oxidation, CVD deposition & annealing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 12 inch semiconductor quartz bases are engineered support structures designed to hold wafer boats or carriers securely during high-temperature semiconductor processes. Crafted from ultra-high purity fused quartz, these bases deliver outstanding thermal stability, corrosion resistance, and dimensional precision under rigorous manufacturing conditions.
Specifically tailored for 300 mm wafer applications, these bases ensure stable and accurate placement within diffusion, oxidation, LPCVD, and annealing furnace systems. Their refined surfaces and robust structure minimize particle contamination and thermal deformation, helping maintain a clean and consistent process environment.
