Quartz boat base
Name:
12-inch Quartz Boat Base
Function & Application:
The quartz boat is placed on top of the base, which is used in wafer manufacturing processes such as diffusion, oxidation, CVD deposition & annealing. These are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 12 inch quartz boat base is a high-purity support component designed to provide a stable foundation for quartz boats during semiconductor and photovoltaic wafer processing. Manufactured from durable fused quartz, it offers excellent thermal resistance, chemical inertness, and long-term structural reliability under high-temperature conditions.
Its precise geometry ensures proper alignment and secure positioning of quartz boats within diffusion and LPCVD furnace systems, promoting uniform wafer heating and minimizing vibration or displacement during thermal cycling. The smooth, flat surface reduces particle generation and supports cleanroom-compatible operations.
