Reaction Tubes
Name:
12-inch Quartz Bell Jar
Function & Application:
The 12-inch quartz bell jar serves as a core component in high-temperature epitaxial equipment. It performs key functions such as sealing the reaction chamber, withstanding extreme thermal stress, and optimizing thermal field and gas flow design. It is applied in epitaxial growth processes, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, and low impurity content.
-
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
-
+86-572-3032373
+86-572-3033016
The 12 inch quartz reaction tubes are essential components designed for high-temperature semiconductor and photovoltaic processing systems requiring larger wafer capacities. Manufactured from high-purity fused quartz, these tubes provide outstanding thermal shock resistance, chemical inertness, and mechanical strength.
Their expanded diameter allows for efficient processing of larger wafers or increased batch sizes, while maintaining precise dimensional control and smooth inner surfaces for uniform gas flow and temperature distribution. These tubes excel in diffusion, oxidation, LPCVD, and annealing applications, ensuring consistent process results and high device yields.
