Name:
Quartz Ignition Gun
Function & Application:
The quartz ignition gun serves dual functions of safe ignition and flame monitoring in high-temperature semiconductor manufacturing processes. It safely ignites process gases, continuously monitors the flame, and maintains process stability. It is applied in oxidation, CVD deposition, and furnace tube cleaning processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The 8 inch quartz chamber serves as a critical enclosure for high-purity, high-temperature semiconductor and photovoltaic processing. Made from premium fused quartz, the chamber offers excellent thermal shock resistance, chemical inertness, and optical transparency, ensuring a contamination-free environment during processes like chemical vapor deposition (CVD), oxidation, and diffusion.
Designed to accommodate 200 mm wafers, the chamber provides uniform temperature and gas distribution, essential for achieving consistent process results and high device yields. Its precision-engineered construction withstands rigorous thermal cycling while maintaining structural integrity and minimizing particle generation.