Quartz Boat
Name:
8-inch Vertical Furnace Quartz Wafer Boat
Function & Application:
The vertical quartz boat is positioned vertically inside the quartz tube and functions as a carrier for wafer transport, handling, and processing. Wafers are placed onto the quartz boat, which is then loaded into the furnace tube for batch manufacturing. It is used in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch high purity quartz wafer boat is specifically engineered for secure and contamination-free handling of 200 mm wafers in high-temperature semiconductor manufacturing processes. Made from ultra-pure fused quartz, it exhibits outstanding thermal stability, low impurity levels, and excellent resistance to aggressive process gases.
With precise wafer slots and reinforced structural integrity, this boat ensures consistent wafer spacing and alignment, enabling uniform gas flow and heat distribution within oxidation, diffusion, and LPCVD furnace environments. Its smooth surface finish minimizes particle generation and supports cleanroom-grade performance.
