Quartz Boat
Name:
8-inch Vertical Furnace Quartz Wafer Boat
Function & Application:
The vertical quartz boat is placed upright inside the quartz tube and serves as a carrier for wafer transport, handling, and processing. Wafers are placed onto the quartz boat and then loaded into the furnace tube for batch manufacturing. It is used in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch semiconductor quartz wafer carrier is engineered to safely hold and transport 200 mm wafers through critical high-temperature semiconductor processes, including oxidation, diffusion, and LPCVD. Made from ultra-high-purity fused quartz, it provides excellent thermal shock resistance, low impurity levels, and compatibility with cleanroom environments.
Its precise slot geometry and stable structure ensure uniform wafer spacing, minimizing particle generation, mechanical stress, and thermal distortion during processing. The carrier supports optimized gas flow and heat distribution, producing high yield and repeatable results across all wafers. Designed for integration with vertical and horizontal furnace systems, this quartz wafer carrier is a key component for reliable, contamination-free wafer handling in advanced semiconductor manufacturing.
