Quartz Process Tube
Name:
8-inch Quartz Outer Tube
Function & Application:
In semiconductor manufacturing, the quartz outer tube serves as a core carrier for high-temperature processes, performing key roles such as enclosing a high-temperature environment, acting as a container for monocrystalline silicon growth, resisting corrosive gas erosion, and maintaining an ultra-pure environment. It is applied in wafer manufacturing processes including diffusion, oxidation, CVD deposition, material preparation and cleaning, plasma process protection, process monitoring, and gas control, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch quartz process tube is a vital component in high-temperature semiconductor and photovoltaic manufacturing equipment, designed to provide a contamination-free environment for wafer processing. Made from high-purity fused quartz, it delivers exceptional resistance to thermal shock, chemical corrosion, and mechanical stress.
With its precise dimensional control and smooth inner surface, the process tube ensures uniform gas flow and temperature distribution, critical for processes such as oxidation, diffusion, LPCVD, and annealing. Its structural stability under repeated thermal cycling guarantees long service life and consistent production quality. Suitable for both vertical and horizontal furnace systems, the 8 inch quartz process tube supports advanced 200 mm wafer fabrication lines by maintaining process integrity, yield consistency, and operational reliability.
