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Reaction Tubes

product details

Name:

8-inch Quartz Reaction Tube

Function & Application:

The 8-inch quartz reaction tube is a core component for enabling high-temperature processes in semiconductor manufacturing. Its extreme temperature resistance, chemical inertness, and precise thermal field control capabilities support critical operations such as monocrystalline silicon growth, thermal treatment environment formation, corrosion protection, and maintenance of ultra-high purity. It is applied in wafer manufacturing processes including diffusion, oxidation, CVD deposition, and dry etching, which are high-temperature processes.

Performance Requirements:

High temperature resistance, corrosion resistance, and low impurity content.

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  • +86-572-3032373

    +86-572-3033016

More About Products

The quartz glass tube reaction vessel is designed for high-purity chemical reactions and thermal processing in semiconductor and photovoltaic manufacturing, as well as advanced laboratory applications. Constructed from high-quality quartz glass, it offers exceptional thermal shock resistance, excellent chemical inertness, and superior optical clarity.

This reaction vessel provides a controlled environment for uniform gas flow and temperature distribution, ensuring consistent reaction kinetics and minimal contamination. Its smooth inner surface facilitates easy cleaning and reduces particle adherence, making it suitable for both research-scale and industrial-scale processes.

Advantages of Quartz Glass Tube Reaction Vessels

Quartz glass tube reaction vessels are widely used in semiconductor and chemical processing for their high purity and thermal stability.

Their key advantages include:

  • High Chemical Purity – Minimizes contamination, ensuring consistent wafer quality and reliable chemical reactions.
  • Excellent Thermal Stability – Can withstand extreme temperatures without deforming, ideal for diffusion, oxidation, and CVD processes.
  • Low Thermal Expansion – Reduces stress and cracking during rapid temperature changes, increasing vessel lifespan.
  • Superior Optical Transparency – Allows visual monitoring of reactions and ensures uniform heating inside the vessel.
  • Corrosion Resistance – Resistant to aggressive process gases, acids, and other chemicals, reducing maintenance needs.

These advantages make quartz glass tube reaction vessels a critical choice for high-precision semiconductor fabrication, research labs, and advanced chemical processes.

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