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Quartz Bases

product details

Name:

8-inch Quartz Bases

Function & Application:

Several baffles are placed in the center of the base to disperse gas flow and ensure stable gas exposure to silicon wafers inside the quartz boat positioned on top. It is applied in wafer manufacturing processes such as diffusion, oxidation, CVD deposition & annealing, which are high-temperature processes.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

More About Products

The fused quartz pedestal is a critical support component designed for semiconductor and photovoltaic high-temperature processing equipment. Made from ultra-pure fused quartz, it provides excellent thermal shock resistance, chemical inertness, and mechanical durability under rigorous thermal cycling.

This pedestal ensures stable and precise positioning of wafers or quartz boats within diffusion, oxidation, LPCVD, and annealing furnaces. Engineered for compatibility with a variety of 8 inch quartz boats and furnace systems, the fused quartz pedestal supports reliable, contamination-free processing essential for advanced semiconductor fabrication.

Cost Benefits of Using Durable Fused Quartz Pedestals in Semiconductor Manufacturing

1. Reduced Replacement Frequency

Durable fused quartz pedestals withstand repeated thermal cycling and chemical exposure, minimizing breakage and deformation. Fewer replacements mean lower procurement costs over time.

2. Minimized Downtime

Reliable pedestals ensure stable wafer positioning and consistent gas flow, reducing the risk of furnace shutdowns caused by pedestal failure. Less downtime translates directly into higher production efficiency and cost savings.

3. Lower Maintenance Costs

High-quality fused quartz resists corrosion and contamination, reducing the need for cleaning and maintenance interventions. Maintenance teams can focus on other critical tasks, saving labor costs.

4. Enhanced Wafer Yield

Stable pedestals maintain uniform thermal distribution and spacing, decreasing wafer defects and increasing yield. Higher yield reduces wasted materials and improves overall profitability.

5. Long-Term ROI

While durable fused quartz pedestals may have a higher initial cost, their longevity, performance stability, and reduction in indirect expenses result in a favorable return on investment for semiconductor manufacturers.

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