Quartz Boat
Name:
8-inch Vertical Furnace Quartz Wafer Boat
Function & Application:
The vertical quartz boat is placed upright inside the quartz tube and serves as a carrier for wafer transport, handling, and processing. Wafers are loaded onto the quartz boat, which is then placed into the furnace tube for batch manufacturing. It is used in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch semiconductor quartz glass boat is purpose-built for handling larger wafer sizes in advanced thermal processing applications such as diffusion, oxidation, and LPCVD. Crafted from high-purity quartz glass, it offers outstanding thermal stability, chemical resistance, and structural integrity in high-temperature furnace environments.
Engineered to support 8 inch (200 mm) wafers with precise spacing and alignment, this quartz boat ensures uniform heat distribution and optimized gas flow across the entire wafer surface. Its smooth, low-contamination surface and dimensional precision make it ideal for cleanroom-class semiconductor fabrication. Compatible with both vertical and horizontal furnace systems, the 8 inch quartz glass boat plays a critical role in maintaining process consistency, yield stability, and overall equipment efficiency in modern wafer manufacturing lines.
