Ventilation Inner Tube
Name:
8-inch Gas-Permeable Inner Tube
Function & Application:
The 8-inch gas-permeable inner tube plays a core role in gas transmission and environmental control during semiconductor manufacturing. Its functions include precise gas delivery, high-temperature environment isolation, and optimization of reaction kinetics. It is applied in wafer manufacturing processes such as CVD deposition, monocrystalline silicon preparation, and dry etching, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch ventilation quartz inner tube is designed for precise gas flow control and thermal isolation within semiconductor furnace systems. Made from high-purity fused quartz, it exhibits excellent resistance to thermal shock, chemical corrosion, and particle contamination—making it ideal for demanding high-temperature processes.
As an inner component of double-tube furnace structures, this quartz tube directs process gases uniformly over wafer surfaces while maintaining separation from the furnace wall. Its optimized geometry enhances laminar flow, reduces boundary layer effects, and supports consistent deposition or diffusion results across 200 mm wafers.
