Quartz Cap
Name:
8-inch Quartz Cap (Quartz Inner Plug)
Function & Application:
The quartz cap is a sealing element of the quartz tube that effectively controls the stability of furnace temperature during wafer processing and reduces heat radiation loss. It is applied in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface treatment, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch fused silica caps are precision-made components designed to seal and protect quartz tubes, reactors, and wafer boats during high-temperature semiconductor and photovoltaic processing. Crafted from ultra-pure fused silica, these caps offer exceptional thermal shock resistance, chemical inertness, and durability under repeated thermal cycling.
Their tight sealing capability prevents contamination and gas leakage, ensuring a stable and clean processing environment essential for oxidation, diffusion, LPCVD, and annealing processes. The caps’ robust construction helps maintain process consistency and extends equipment lifespan in demanding manufacturing settings.
