Horizontal Quartz Boat
Name:
8-inch Horizontal Quartz Wafer Boat
Function & Application:
The horizontal quartz boat is placed horizontally inside the quartz tube and serves as a carrier for wafer transport, handling, and processing. Wafers are placed onto the quartz boat and then loaded into the furnace tube for batch manufacturing. It is applied in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch horizontal quartz boat is purpose-built for secure and precise wafer handling in horizontal furnace systems, widely used for oxidation, diffusion, and annealing processes in 200 mm semiconductor wafer production. Made from high-purity fused quartz, it delivers outstanding thermal stability, corrosion resistance, and dimensional accuracy.
Its horizontal design ensures uniform wafer alignment and spacing along the furnace tube axis, enabling optimized gas flow dynamics and consistent thermal treatment across each wafer. The rigid, low-contamination structure minimizes deformation under high temperatures, helping maintain process integrity and reducing particle generation.
