The quartz pedestal serves as a stable support platform within semiconductor and photovoltaic furnace systems, designed to hold wafers or quartz boats securely during high-temperature processing. Made from high-purity fused quartz, it offers exceptional thermal resistance, chemical inertness, and mechanical strength.

Its precise dimensions ensure optimal alignment and spacing, promoting uniform temperature distribution and gas flow around the wafers. The pedestal’s robust construction withstands repeated thermal cycling without warping or contamination, contributing to consistent process results and equipment longevity.

Maintaining and Cleaning Quartz Pedestals for Maximum Lifespan

Key Maintenance Tips:

• Regular Inspection: Check for cracks, chips, or surface discoloration that could affect thermal stability.
• Gentle Cleaning: Use soft brushes or lint-free cloths and avoid harsh chemicals that could introduce impurities.
• Thermal Cycling Awareness: Minimize rapid temperature changes to prevent thermal shock, which can warp or fracture quartz pedestals.
• Contamination Prevention: Store pedestals in clean, dry environments to reduce exposure to dust, moisture, or chemical residues.

Benefits of Proper Care:

1. Prolonged pedestal lifespan

2. Reduced contamination risk for wafers

3. Improved process uniformity and yield

4. Fewer replacements and lower operational costs

By implementing a consistent maintenance routine, semiconductor fabs can ensure that quartz pedestals continue to deliver high performance, protecting both equipment and wafer quality in demanding high-temperature environments.