Quartz Boat
Name:
8-inch Vertical Furnace Quartz Wafer Boat
Function & Application:
The vertical quartz boat is vertically placed inside the quartz tube and serves as a carrier for wafer transport, handling, and processing. Wafers are placed onto the quartz boat and then loaded into the furnace tube for batch manufacturing. It is applied in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch vertical quartz boat is designed to securely hold 200 mm wafers in vertical furnace systems used for high-temperature processes such as oxidation, diffusion, and LPCVD. Manufactured from high-purity fused quartz, it offers exceptional resistance to thermal shock, chemical corrosion, and mechanical deformation.
Engineered for vertical loading configurations, this quartz boat ensures uniform wafer spacing and stable alignment, promoting even gas distribution and consistent thermal exposure across all wafer surfaces. Its rigid construction maintains integrity under thermal cycling, reducing contamination risks and enhancing process repeatability.
