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Baffle Boat

product details

Name:

6-inch Quartz Baffle

Function & Application:

Quartz baffles play a critical role in stabilizing gas flow and temperature during high-temperature wafer processing. They are used in diffusion, oxidation, and CVD deposition processes to disperse gas flow evenly, ensuring that silicon wafers inside the quartz boat receive a uniform and stable flow.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.

Contact us
  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

More About Products

The quartz baffle boat is a high-purity quartz solution designed to enhance gas flow control and thermal consistency during high-temperature semiconductor processes such as diffusion, oxidation, and CVD. By integrating precision-formed baffle structures, it ensures uniform gas dispersion throughout the quartz boat, enabling each silicon wafer to receive stable and equal exposure to process gases.

This contributes significantly to thin-film uniformity and reduces wafer-to-wafer variations, ultimately improving device yield. Its robust construction offers outstanding high-temperature resistance, corrosion resistance, and thermal stability, while the sandblasted surface helps minimize particle generation. Each unit is manufactured with low impurity content and tight dimensional tolerances, making it a reliable choice for demanding cleanroom environments and automated wafer handling systems.

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