Name:
6-inch Quartz Baffle
Function & Application:
Quartz baffles play a critical role in stabilizing gas flow and temperature during high-temperature wafer processing. They are used in diffusion, oxidation, and CVD deposition processes to disperse gas flow evenly, ensuring that silicon wafers inside the quartz boat receive a uniform and stable flow.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The quartz baffle boat is a high-purity quartz solution designed to enhance gas flow control and thermal consistency during high-temperature semiconductor processes such as diffusion, oxidation, and CVD. By integrating precision-formed baffle structures, it ensures uniform gas dispersion throughout the quartz boat, enabling each silicon wafer to receive stable and equal exposure to process gases.
This contributes significantly to thin-film uniformity and reduces wafer-to-wafer variations, ultimately improving device yield. Its robust construction offers outstanding high-temperature resistance, corrosion resistance, and thermal stability, while the sandblasted surface helps minimize particle generation. Each unit is manufactured with low impurity content and tight dimensional tolerances, making it a reliable choice for demanding cleanroom environments and automated wafer handling systems.