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Quartz Boat

product details

Name:

6-inch Quartz Boat

Function & Application:

The quartz boat is a carrier used to transport and process semiconductor wafers. Wafers are placed onto the quartz boat and then loaded into the furnace tube for batch processing. It is applied in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

More About Products

High-Temperature Quartz Boats for Annealing are precision-engineered wafer carriers designed to withstand the demanding conditions of thermal annealing and other high-temperature semiconductor processes such as diffusion, oxidation, and CVD deposition. Made from high-purity fused quartz, these boats offer excellent thermal stability, low thermal expansion, and strong resistance to chemical corrosion and thermal shock.

Their robust structure ensures consistent wafer support and alignment during thermal cycling, while the smooth, low-particle surfaces help minimize contamination risks and protect wafer integrity. The boats are optimized for uniform heat transfer and gas flow within the furnace tube, enabling consistent annealing results across all wafers in a batch. Ideal for both production fabs and R&D environments, these quartz boats meet the stringent requirements of modern semiconductor manufacturing.

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