Name:
6-inch Quartz Tile Boat
Function & Application:
The arc-shaped curved plate features two rows of small holes in the middle, enabling its use in high-purity nitrogen, oxygen, or other inert gas environments. This design ensures uniform heating and full reaction with process gases without contaminating the silicon wafers. It is applied in high-temperature wafer fabrication processes such as diffusion, oxidation, and CVD deposition.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The Good Quality Quartz Tile Boat is a high-performance wafer carrier engineered for use in high-temperature semiconductor fabrication processes such as diffusion, oxidation, and CVD deposition. Made from high-purity fused quartz, this boat features an arc-shaped curved plate with two central rows of precision-drilled holes. This design promotes uniform gas flow and consistent heating across all wafer surfaces, ensuring full and clean reaction with process gases in controlled atmospheres such as nitrogen, oxygen, or other inert gases.
Its sandblasted surface reduces particle shedding while improving thermal stability and mechanical grip during processing. With excellent resistance to high temperatures and corrosive environments, along with low impurity levels, this tile boat ensures contamination-free performance and stable wafer positioning. It is ideal for both production and R&D environments where process consistency and material purity are critical.