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Boat Support

product details

Name:

6-inch Quartz Boat Holder

Function & Application:

The quartz boat serves as a carrier for transporting and processing semiconductor wafers. It is hooked by a quartz hook at the central rod, and the bottom rollers rotate to drive the movement of the boat holder. It is applied in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.

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More About Products

The Fused Silica Quartz Boat Holder is a precision-engineered component designed to securely carry and transport semiconductor quartz boats during high-temperature wafer manufacturing processes such as diffusion, oxidation, and CVD deposition. Equipped with a quartz hook on the central rod and bottom rollers, it enables smooth, controlled movement of the boat holder within the furnace tube, facilitating efficient batch processing.

Constructed from ultra-pure fused silica, this holder offers exceptional thermal stability, corrosion resistance, and high optical transparency. Its low impurity content ensures minimal contamination, maintaining cleanroom standards and protecting wafer integrity during critical thermal cycles. The robust design guarantees reliable operation under harsh conditions, making it an essential element in advanced semiconductor fabrication.

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