Name:
6-inch Quartz Boat for Laboratory Use
Function & Application:
This quartz boat is specifically designed for laboratory experiments and testing purposes. Wafers are loaded onto the boat and placed into the furnace tube for small-scale test runs. It is suitable for high-temperature processes in wafer manufacturing, such as diffusion, oxidation, and CVD deposition.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The fused quartz boat for laboratory use is precisely engineered to meet the stringent requirements of small-scale semiconductor testing and experimental processes. Made from ultra-high purity fused quartz (≥99.99% SiO?), it delivers outstanding thermal stability, chemical resistance, and minimal impurity content, ensuring contamination-free handling during high-temperature processes such as diffusion, oxidation, and CVD deposition.
Specifically designed for lab-scale furnace tubes, this boat offers excellent resistance to thermal shock and aggressive process gases. Its smooth surface minimizes particle generation, protecting delicate wafer edges while maintaining precise wafer spacing. Ideal for research and development centers, semiconductor labs, and pilot production, this quartz boat provides reliable performance and process consistency in demanding cleanroom environments. Custom configurations are available to fit various furnace models and experimental setups.
A fused quartz boat is a specially designed carrier made from high-purity fused quartz, widely used in laboratory settings for high-temperature processes. Its primary function is to securely hold samples, wafers, or substrates inside tube furnaces during procedures like chemical vapor deposition (CVD), oxidation, annealing, and diffusion.
What sets fused quartz boats apart is their exceptional thermal stability, chemical inertness, and low thermal expansion. These properties make them ideal for environments reaching temperatures above 1000°C without deforming or contaminating the samples.
In the lab, using a fused quartz boat ensures uniform heat distribution and prevents unwanted chemical reactions, which is crucial for maintaining sample integrity and achieving consistent experimental results.
Whether you’re running semiconductor experiments or material synthesis, a quality fused quartz boat is a reliable companion that supports precision and repeatability in your processes.