Name:
6-inch Quartz Wafer Boat
Function & Application:
The quartz wafer boat serves as a carrier for semiconductor wafers, which are loaded onto the boat and then placed into the furnace tube for batch processing. It is used in high-temperature processes such as diffusion, oxidation, and CVD deposition during wafer manufacturing.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The high purity quartz crystal wafer boat is a meticulously engineered carrier designed to securely hold silicon wafers during high-temperature semiconductor processes such as diffusion, oxidation, and CVD deposition. Constructed from ultra-high purity quartz (>99.99% SiO?), it offers exceptional thermal stability, chemical inertness, and minimal impurity levels, ensuring contamination-free wafer processing.
This quartz wafer boat features a robust design that maintains dimensional accuracy and structural integrity through repeated thermal cycling. Its polished, smooth surfaces minimize particle generation and protect the delicate edges of wafers. Optimized for uniform wafer spacing and enhanced gas flow, it promotes consistent temperature distribution across all wafers, contributing to improved process yields and device performance. Ideal for demanding cleanroom environments and compatible with automated handling systems, this boat is essential for reliable semiconductor fabrication.