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Quartz Boat

product details

The 6 inch high purity quartz crystal boat is a precision-crafted support structure designed for handling silicon wafers or crystalline substrates during high-temperature semiconductor and crystal growth processes. Made from ultra-high purity quartz (>99.99% SiO?), this boat ensures exceptional thermal stability, chemical inertness, and minimal contamination—critical for sensitive applications such as epitaxy, annealing, diffusion, and crystal growth.

Its robust, heat-resistant design provides excellent dimensional integrity under repeated thermal cycling, while the smooth, polished surfaces reduce particle generation and protect delicate wafer or crystal edges. The structure is optimized for uniform wafer spacing and efficient gas flow, enabling consistent thermal distribution and improved process yield.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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