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Quartz Boat

product details

Name:

6-inch Quartz Boat, also known as "Basket" Cassette

Function & Application:

Utilized in wafer production and semiconductor manufacturing cleaning processes. It serves as a carrier for silicon wafers during acid cleaning and ultrasonic cleaning steps, coming into direct contact with monocrystalline silicon wafers. This is a low-temperature process.

Performance Requirements:

Corrosion resistance and low impurity content.

Contact us
  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

More About Products

The wafer carrier quartz boat, also known as a “basket” cassette, is engineered for secure wafer handling during semiconductor cleaning processes. Made from high-purity fused quartz, it ensures excellent chemical resistance and minimal impurity levels, making it suitable for direct contact with monocrystalline silicon wafers. Optimized for low-temperature acid and ultrasonic cleaning, this precision component supports stable wafer alignment and reduces contamination risks. Ideal for cleanroom environments in semiconductor fabrication and research applications.

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