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Quartz Bases

product details

Name:

6-inch Quartz Base

Function & Application:

The quartz base supports a quartz boat on top and is used in wafer manufacturing processes such as diffusion, oxidation, CVD deposition, and annealing. It helps to distribute gas flow evenly, ensuring stable gas exposure to silicon wafers inside the top quartz boat. This is a high-temperature process.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.

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More About Products

High Purity Quartz Pedestals serve as stable support structures designed to hold quartz boats securely during high-temperature semiconductor wafer fabrication processes such as diffusion, oxidation, CVD deposition, and annealing. Crafted from ultra-pure fused quartz, these pedestals provide excellent thermal stability and corrosion resistance, essential for maintaining process integrity.

Their precision-engineered sandblasted surfaces enhance gas flow distribution, ensuring uniform exposure of process gases to silicon wafers within the quartz boat. With low impurity content and robust construction, these pedestals minimize contamination risks and withstand repeated thermal cycling, making them indispensable components in advanced semiconductor manufacturing environments.

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