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Cage Boat

product details

Name:

6-inch Quartz Cage Boat

Function & Application:

The arc-shaped curved plate is perforated with small holes, allowing the boat to be used in high-purity nitrogen, oxygen, or other inert gas environments. This design ensures uniform heating and full reaction with process gases without contaminating the silicon wafers. The 6-inch quartz cage boat is used together with a matching bottom and lid. It is typically applied in high-temperature wafer fabrication processes such as diffusion, oxidation, and CVD deposition.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.

Contact us
  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

More About Products

The quartz cage boat is a precision-crafted high-purity quartz component designed to hold silicon wafers securely during high-temperature semiconductor processes such as diffusion, oxidation, and CVD deposition. Its arc-shaped curved plates are perforated with fine holes, enabling uniform heating and optimal gas exchange in inert or reactive atmospheres like nitrogen or oxygen—without introducing contaminants to the wafers.

This open cage structure enhances thermal uniformity and ensures full interaction between process gases and wafer surfaces, contributing to consistent processing results. Typically used in conjunction with a matched quartz base and lid, the cage boat features excellent thermal stability, corrosion resistance, and low impurity levels. Its high optical transparency supports visual inspection, and the design is compatible with automated handling systems in cleanroom environments. Custom configurations are available to meet specific furnace or process needs.

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