The fused wafer carrier quartz glass boat is a high-purity support structure engineered for transporting and processing semiconductor wafers under high-temperature conditions. Crafted from precision-melted fused quartz glass, it offers exceptional thermal shock resistance, excellent dimensional stability, and ultra-low impurity content—making it ideal for critical thermal processes in semiconductor fabrication.

Designed for use in diffusion, oxidation, LPCVD, and annealing, the boat features accurately machined slots that ensure secure wafer placement and uniform spacing, promoting even thermal exposure and process consistency. Its smooth, low-particle surface helps minimize contamination and supports cleanroom manufacturing standards. With superior chemical resistance and long-term durability, this quartz glass boat provides reliable performance in both mass production and research environments requiring high purity and precision.

How to Check if Fused Wafer Carrier Quartz Glass Boats Fit the Furnace

Ensuring that your fused wafer carrier quartz glass boats properly fit inside your semiconductor furnace is critical for optimal wafer processing. A correct fit guarantees uniform heating, stable gas flow, and prevents damage to both the boat and furnace components. Here are the key steps to verify fitment:

1. Measure the Boat Dimensions Accurately

Start by precisely measuring the length, width, height, and slot spacing of your quartz boat. Use calibrated tools such as digital calipers to ensure accuracy. Compare these dimensions against the furnace specifications or the original equipment manufacturer (OEM) guidelines.

2. Confirm Compatibility with Furnace Model

Different furnaces have varying internal diameters, loading mechanisms, and automation interfaces. Check that the boat’s dimensions and design match your furnace model’s requirements. Some furnaces also specify maximum allowable weights and material types.

3. Check Loading and Unloading Clearance

Ensure there is enough clearance not only for the boat itself but also for the handling tools, such as robotic arms or manual carriers. The quartz boat should slide smoothly into the furnace tube without risk of scraping or jamming.

4. Inspect Slot and Wafer Capacity

Verify that the number of wafer slots and their spacing fits your wafer size and batch requirements. Proper slot alignment is necessary to maintain even wafer spacing and uniform exposure to process gases.

5. Consider Thermal Expansion

Quartz expands when heated. Make sure there is sufficient room inside the furnace tube to accommodate the thermal expansion of both the boat and the wafers, preventing mechanical stress or damage.

6. Trial Run and Visual Inspection

Before full production, perform a trial loading to observe fit and ease of handling. Visually inspect for any tight spots or misalignments. Monitor the boat during a heating cycle to ensure stability and uniform thermal distribution.