The Curved Plate Fused Silica Boat is a high-precision wafer carrier designed for semiconductor applications involving high-temperature batch processing, such as diffusion, oxidation, and CVD deposition. Manufactured from high-purity fused silica, this boat delivers exceptional thermal stability, minimal thermal expansion, and excellent resistance to both corrosion and thermal shock.

Its bent plate structure offers stable wafer support and enhances uniform gas flow and heat transfer within the furnace tube. The smooth, clean surface minimizes particle generation, while the material’s high optical transparency supports visual inspection when needed. Designed for consistent wafer alignment and low contamination risk, the fused silica bent plate boat meets the stringent requirements of advanced semiconductor manufacturing, research labs, and pilot lines.

Why it is called Curved Plate Quartz Boat?

The term "Curved Plate Quartz Boat" comes from both its material and design shape:

Quartz: The boat is made from high-purity quartz (fused silica), a material prized in semiconductor manufacturing for its excellent thermal stability, chemical resistance, and low impurity content.

Curved Plate: Unlike flat or tubular boats, this design features a plate that is bent or curved into an arc shape. This bent (curved) plate structure helps improve gas flow distribution and thermal uniformity around the wafers during high-temperature processing. The curvature allows better exposure of wafers to process gases and more even heat distribution.

Boat: In semiconductor processing, “boat” is the industry term for a carrier or fixture that holds wafers securely during furnace or diffusion tube processing.

So, "Curved Plate Quartz Boat" literally means a quartz-based wafer carrier with a bent (curved) plate design optimized for uniform wafer processing in high-temperature semiconductor fabrication.