Name:
6-inch Quartz Base
Function & Application:
The quartz base supports a quartz boat on top and is used in wafer manufacturing processes such as diffusion, oxidation, CVD deposition, and annealing. It disperses gas flow to ensure stable gas exposure to silicon wafers inside the top quartz boat. This is a high-temperature process.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
Vertical Furnace Quartz Pedestals are precision-engineered support components designed to securely hold quartz boats during high-temperature semiconductor wafer manufacturing processes such as diffusion, oxidation, CVD deposition, and annealing. Made from ultra-pure fused quartz, these pedestals offer exceptional thermal stability and corrosion resistance necessary for maintaining process integrity in vertical furnace environments.
The sandblasted surface promotes even gas dispersion, ensuring stable and uniform gas exposure to silicon wafers within the quartz boat. With low impurity content and a robust structure capable of withstanding repeated thermal cycling, these pedestals contribute to contamination-free processing and consistent high yields in advanced semiconductor fabrication.