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Quartz Boat

product details

The 6 inch semiconductor quartz glass boat is a precision-engineered wafer support solution specifically designed for high-temperature processes in semiconductor manufacturing. Made from high-purity quartz glass, this boat offers outstanding thermal stability, chemical resistance, and dimensional accuracy, making it an ideal choice for demanding applications such as diffusion, oxidation, LPCVD, and annealing.

With a smooth, low-contamination surface and precisely machined slots, the boat ensures secure and consistent wafer placement, minimizing particle generation and mechanical stress on the wafers. Its robust structure is built to withstand repeated thermal cycling without deformation, ensuring long-term performance and process reliability.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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