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Quartz Boat

product details

Name:

6-inch Quartz Bent Plate Boat

Function & Application:

The quartz boat is a carrier used to transport and process semiconductor wafers. Wafers are placed onto the quartz boat and then loaded into the furnace tube for batch processing. It is applied in high-temperature wafer fabrication processes such as diffusion, oxidation, and CVD deposition.

Performance Requirements:

High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

More About Products

The High-Purity Quartz Bent Plate Boat is a precision-engineered wafer carrier designed for high-temperature semiconductor processes such as diffusion, oxidation, and CVD deposition. Made from ultra-clean fused quartz, this boat offers outstanding thermal stability, chemical resistance, and minimal impurity levels, making it ideal for cleanroom environments and contamination-sensitive applications.

Its bent plate design provides a stable and secure platform for wafer placement, allowing uniform heat transfer and controlled gas exposure during batch processing in furnace tubes. The structure ensures accurate wafer alignment and reduces mechanical stress, while the smooth, optically transparent quartz surface minimizes particle generation. Engineered for durability under repeated thermal cycling, this quartz boat supports consistent performance and process integrity in both production lines and laboratory testing environments.

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