Name:
6-inch Quartz Boat
Function & Application:
The quartz boat is a carrier used to transport and process semiconductor wafers. Wafers are loaded onto the boat and placed into the furnace tube for batch processing. It is widely used in high-temperature wafer fabrication processes such as diffusion, oxidation, and CVD deposition.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, high optical transparency, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The quartz boat for diffusion of wafer processing is a high-precision carrier specifically designed to support silicon wafers during high-temperature diffusion steps in semiconductor manufacturing. Constructed from high-purity fused quartz, this boat delivers exceptional thermal stability, minimal thermal expansion, and superior chemical corrosion resistance, making it ideal for use in oxidizing and dopant-rich furnace environments.
Its engineered design optimizes gas flow and thermal uniformity within the furnace tube, ensuring even diffusion across all wafer surfaces for consistent dopant distribution and layer formation. The precisely machined slots securely hold wafers with accurate spacing and alignment, reducing the risk of wafer warpage and particle contamination. Robust and reliable, this quartz boat enables high-yield, repeatable diffusion processing critical to semiconductor device quality and performance.