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Quartz Boat

product details

The 6 inch quartz wafer carrier boat for diffusion furnaces is engineered to provide secure and stable support for 6-inch silicon wafers during high-temperature diffusion processes. Manufactured from high-purity fused quartz, this boat ensures excellent thermal stability, chemical resistance, and minimal particle generation, which are critical for maintaining process integrity and wafer quality.

Its precision slot design promotes uniform gas flow and consistent temperature distribution within diffusion furnaces, resulting in improved dopant diffusion uniformity and enhanced device performance. The robust quartz construction withstands repeated thermal cycling without warping or cracking, ensuring long service life and reliable process repeatability.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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