Name:
6-inch Quartz Baffle
Function & Application:
The frosted baffle provides thermal insulation for the high-temperature processing furnace tube. Small tubes on the baffle allow the injection of gases required for wafer manufacturing. It is applied in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface treatment, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
The Quartz Baffle features a frosted, sandblasted surface designed to provide effective thermal insulation within high-temperature semiconductor furnace tubes. Its structure incorporates small tubes to facilitate precise injection of process gases necessary for wafer manufacturing, such as diffusion, oxidation, and CVD deposition.
Constructed from high-purity fused quartz, this baffle offers excellent resistance to heat, chemical corrosion, and thermal shock, while maintaining low impurity levels to minimize contamination risks. The sandblasted surface enhances thermal performance and reduces particle generation, ensuring stable temperature control and consistent gas distribution throughout the process. Ideal for semiconductor fabs and R&D labs, the Quartz Baffle improves process uniformity and wafer quality.